[IEEE 2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) - Taipei, Taiwan (2009.10.21-2009.10.23)] 2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference - Birefringence simulations of annealed ingot of calcium fluoride single crystal by considering creep behavior of ingot during annealing process

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