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[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Rapid root cause analysis and process change validation with design-centric volume diagnostics in production yield enhancement
Appello, Davide, Tancorre, Vincenzo, Gomez, Jacky, Rosi, Daniele Li, Suzor, Christophe, Kekare, Sagar A.Year:
2010
Language:
english
DOI:
10.1109/asmc.2010.5551475
File:
PDF, 1.02 MB
english, 2010