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Fabrication of AlN Films by RF Magnetron Sputtering for Surface Acoustic Wave Applications
Shih, Wen-Ching, Zoh, Zhi-XiongVolume:
459
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150193.2013.837768
Date:
January, 2014
File:
PDF, 564 KB
english, 2014