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Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining
van Rijn, C., van der Wekken, M., Nijdam, W., Elwenspoek, M.Volume:
6
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.557530
Date:
March, 1997
File:
PDF, 272 KB
english, 1997