[IEEE 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Daerah Langkawi, Malaysia (2013.09.25-2013.09.27)] RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics - Morphology, topography and thickness of copper oxide thin films deposited using magnetron sputtering technique
Low, Jia Wei, Nayan, Nafarizal, Sahdan, Mohd Zainizan, Ahmad, Mohd Khairul, Shakaff, Ali Yeon Md, Zakaria, Ammar, Zain, Ahmad Faizal MohdYear:
2013
Language:
english
DOI:
10.1109/rsm.2013.6706548
File:
PDF, 381 KB
english, 2013