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[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - High-density IC chip integration with parylene pocket
Chang, Jay Han-Chieh, Huang, Ray, Tai, Yu-ChongYear:
2011
Language:
english
DOI:
10.1109/nems.2011.6017541
File:
PDF, 616 KB
english, 2011