[IEEE 2008 33rd IEEE Photovolatic Specialists Conference (PVSC) - San Diego, CA, USA (2008.05.11-2008.05.16)] 2008 33rd IEEE Photovolatic Specialists Conference - Deposition phase diagram of micro-crystalline silicon and optical emission spectroscopy study in PECVD process
Zhenzhong Sun,, Fengzhen Liu,, Meifang Zhu,, Yuqin Zhou,, Wei Zi,, Chaowei Li,Year:
2008
Language:
english
DOI:
10.1109/pvsc.2008.4922570
File:
PDF, 3.09 MB
english, 2008