[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and...

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[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference - Shimane, Japan (31 Oct.-2 Nov. 2001)] Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) - Improved crystalline quality of GaN by substrate ion beam pre-treatment

Dongjin Byun,, Yong Suk Cho,, Jaekyun Kim,, Young Ju Park,, Eun Kyu Kim,, Gyeungho Kim,, Eui-kwan Koh,, Suk-Ki Min,
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Year:
2001
Language:
english
DOI:
10.1109/imnc.2001.984169
File:
PDF, 87 KB
english, 2001
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