Design and static modeling of a semiconductor polymeric...

Journal of Microelectromechanical Systems 1992 / Sept. Vol. 1; Iss. 3

Design and static modeling of a semiconductor polymeric piezoelectric microactuator

Brei, D.E., Blechschmidt, J.
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Volume:
1
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.186389
Date:
January, 1992
File:
PDF, 867 KB
english, 1992
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