[IEEE 1991 Eighth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (11-12 June 1991)] 1991 Proceedings Eighth International IEEE VLSI Multilevel Interconnection Conference - High density plasma etching of aluminum alloys
Bradley, S., Ching-Hwa Chen,, Kovall, G.Year:
1991
Language:
english
DOI:
10.1109/vmic.1991.153005
File:
PDF, 355 KB
english, 1991