[IEEE 2000 Symposium on VLSI Technology. Digest of...

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[IEEE 2000 Symposium on VLSI Technology. Digest of Technical Papers - Honolulu, HI, USA (13-15 June 2000)] 2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104) - Novel MIS Al/sub 2/O/sub 3/ capacitor as a prospective technology for Gbit DRAMs

In-Sung Park,, Byoung Taek Lee,, Sung Je Choi,, Jae Soon Im,, Seung Hwan Lee,, Ki Yeon Park,, Joo Won Lee,, Yong Woo Hyung,, Yeong Kwan Kim,, Heung Soo Park,, Young Wook Park,, Sang In Lee,
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Year:
2000
Language:
english
DOI:
10.1109/vlsit.2000.852761
File:
PDF, 249 KB
english, 2000
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