[IEEE 2010 17th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2010) - Singapore, Singapore (2010.07.5-2010.07.9)] 2010 17th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - 300mm wafer Atomic force probe characterization methodology
Kane, TerenceYear:
2010
Language:
english
DOI:
10.1109/ipfa.2010.5531988
File:
PDF, 568 KB
english, 2010