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[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - RF-MEMS beam components: FEM modelling and experimental identification of pull-in in presence of residual stress
Ballestra, Alberto, Brusa, Eugenio, De Pasquale, Giorgio, Gh. Munteanu, Mircea, Soma, AurelioYear:
2008
Language:
english
DOI:
10.1109/dtip.2008.4752990
File:
PDF, 1.82 MB
english, 2008