Electrical Characterization of Etch Rate for Micro- and...

Journal of Microelectromechanical Systems 2010 / 10 Vol. 19; Iss. 5

Electrical Characterization of Etch Rate for Micro- and Nano-Scale Gap Formation

Lee, Donovan, Tran, Helen, Ho, Byron, Liu, Tsu-Jae King
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2067432
Date:
October, 2010
File:
PDF, 621 KB
english, 2010
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