[IEEE International Electron Devices Meeting. IEDM Technical Digest - Washington, DC, USA (7-10 Dec. 1997)] International Electron Devices Meeting. IEDM Technical Digest - Multi-layer enhancement to polysilicon surface-micromachining technology
Sniegowski, J.J., Rodgers, M.S.Year:
1997
Language:
english
DOI:
10.1109/iedm.1997.650527
File:
PDF, 1.52 MB
english, 1997