A high-resolution high-frequency monolithic top-shooting microinjector free of satellite drops - part II: fabrication, implementation, and characterization
Fan-Gang Tseng,, Chang-Jin Kim,, Chih-Ming Ho,Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.802901
Date:
October, 2002
File:
PDF, 432 KB
english, 2002