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[IEEE 2008 International Conference on Electronic Materials and Packaging (EMAP) - Taipei, Taiwan (2008.10.22-2008.10.24)] 2008 International Conference on Electronic Materials and Packaging - Mechanical property measurement of nano-scale metal films on the novel paddle cantilever beams using four step phase-shifting method
Yan-Ting Chen,, Ya-Chi Cheng,, Kuan-Jung Chung,, Ming-Tzer Lin,Year:
2008
Language:
english
DOI:
10.1109/emap.2008.4784258
File:
PDF, 3.52 MB
english, 2008