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Triton Surfactant as an Additive to KOH Silicon Etchant
Rola, Krzysztof P., Zubel, IrenaVolume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2262590
Date:
December, 2013
File:
PDF, 19.51 MB
english, 2013