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Vacuum Steered-Electron Electric-Field Sensor
Williams, Kirt R., De Bruyker, Dirk P. H., Limb, Scott J., Amendt, Eric M., Overland, Doug A.Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2262924
Date:
February, 2014
File:
PDF, 1.44 MB
english, 2014