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A novel bulk micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display
Yobas, L., Huff, M.A., Lisy, F.J., Durand, D.M.Volume:
10
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.925734
Date:
June, 2001
File:
PDF, 283 KB
english, 2001