The Effect of Microstructure on AlN MEMS Resonator Response

Integrated Ferroelectrics 2003 / 04 Vol. 54; Iss. 1

The Effect of Microstructure on AlN MEMS Resonator Response

Wickenden, A. E., Currano, L. J., Takacs, T., Pulskamp, J., Dubey, M., Hullavarad, S., Vispute, R. D.
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Volume:
54
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580390258976
Date:
April, 2003
File:
PDF, 237 KB
english, 2003
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