Wafer Scale Formation of Monocrystalline Silicon-Based Mie...

ACS Nano 2014 / 11 Vol. 8; Iss. 11

Wafer Scale Formation of Monocrystalline Silicon-Based Mie Resonators via Silicon-on-Insulator Dewetting

Abbarchi, Marco, Naffouti, Meher, Vial, Benjamin, Benkouider, Abdelmalek, Lermusiaux, Laurent, Favre, Luc, Ronda, Antoine, Bidault, Sébastien, Berbezier, Isabelle, Bonod, Nicolas
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Volume:
8
Language:
english
Journal:
ACS Nano
DOI:
10.1021/nn505632b
Date:
November, 2014
File:
PDF, 2.60 MB
english, 2014
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