Fabrication of a Monolithic Array of Three Dimensional...

Journal of Microelectromechanical Systems 2013 / 10 Vol. 22; Iss. 5

Fabrication of a Monolithic Array of Three Dimensional Si-based Ion Traps

See, Patrick, Wilpers, Guido, Gill, Patrick, Sinclair, Alastair G.
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2262573
Date:
October, 2013
File:
PDF, 7.41 MB
english, 2013
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