Ti quadlevel resist process for the fabrication of Nb SIS...

IEEE Transactions on Appiled Superconductivity 2003 / 06 Vol. 13; Iss. 2

Ti quadlevel resist process for the fabrication of Nb SIS junctions

Clark, W.W., Zhang, J.Z., Lichtenberger, A.W.
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2003.813659
Date:
June, 2003
File:
PDF, 659 KB
english, 2003
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