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[IEEE 2007 International Semiconductor Device Research Symposium - College Park, MD, USA (2007.12.12-2007.12.14)] 2007 International Semiconductor Device Research Symposium - Implant activation in GaN Using an AlN cap
Hager, C., Jones, K. A., Derenge, M.A., Ewing, D.J., Zheleva, T.S.Year:
2007
Language:
english
DOI:
10.1109/isdrs.2007.4422382
File:
PDF, 162 KB
english, 2007