Voltage Contrast for Gate-Leak Failures Detected by...

IEEE Transactions on Semiconductor Manufacturing 2007 / 08 Vol. 20; Iss. 3

Voltage Contrast for Gate-Leak Failures Detected by Electron Beam Inspection

Fujiyoshi, Katsuhiro, Sawai, Koetsu, Inoue, Kazutaka, Saiki, Keiichi, Sakurai, Koichi
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Volume:
20
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2007.901826
Date:
August, 2007
File:
PDF, 1.74 MB
english, 2007
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