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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Micro uniformity in MeV implantation
Heden, C., Davis, B., Heckman, V., Weisenberger, W., McMillen, J.A.Year:
1997
Language:
english
DOI:
10.1109/iit.1996.586191
File:
PDF, 518 KB
english, 1997