[IEEE COMMAD 2000 Conference on Optoelectronic amd Microelectronic Materials and Devices - Bundoora, Vic., Australia (6-8 Dec. 2000)] COMMAD 2000 Proceedings. Conference on Optoelectronic and Microelectronic Materials and Devices - Defects density distribution of AIN films produced by RF sputtering in argon-nitrogen-hydrogen mixture
Ligatchev, V., Yoon, S.F., Ahn, J., Zhang, Q., Rusli,Year:
2000
Language:
english
DOI:
10.1109/commad.2000.1022971
File:
PDF, 358 KB
english, 2000