First-Principles Predictions and in Situ...

Chemistry of Materials 2014 / 12 Vol. 26; Iss. 23

First-Principles Predictions and in Situ Experimental Validation of Alumina Atomic Layer Deposition on Metal Surfaces

Lu, Junling, Liu, Bin, Guisinger, Nathan P., Stair, Peter C., Greeley, Jeffrey P., Elam, Jeffrey W.
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Volume:
26
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm503178j
Date:
December, 2014
File:
PDF, 1.95 MB
english, 2014
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