High-performance Nb integrated circuit process fabrication

IEEE Transactions on Appiled Superconductivity 2003 / 06 Vol. 13; Iss. 2

High-performance Nb integrated circuit process fabrication

Murduck, J.M., Kirschenbaum, A., Mayer, A., Morales, V., Lavoie, C.
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2003.813651
Date:
June, 2003
File:
PDF, 1.24 MB
english, 2003
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