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[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Fabrication of complicated three dimensional structures utilizing multi-stack bonding
Mingda Zhou,, Yilong Hao,, Chengchen Gao,, Zhihong Li,, Qifang Hu,Year:
2009
Language:
english
DOI:
10.1109/nems.2009.5068767
File:
PDF, 9.88 MB
english, 2009