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In situ spectroscopic ellipsometry growth studies on the Al-doped ZnO films deposited by remote plasma-enhanced metalorganic chemical vapor deposition
Volintiru, I., Creatore, M., van de Sanden, M. C. M.Volume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2837109
File:
PDF, 1.07 MB
english, 2008