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[IEEE International Electron Devices Meeting - Washington, DC, USA (10-13 Dec. 1995)] Proceedings of International Electron Devices Meeting - High performance 0.25 μm SRAM technology with tungsten interpoly plug
McNelly, T.F., Hayden, J.D., Perera, A.H., Pfiester, J.R., Subramanian, C.K., Blackwell, M., James, B., Ajuria, S., Fell, W., Ku, Y.C., Lii, T., Lin, J.-H., Nkansah, F., Philbin, C., Sun, C.J., ThompsYear:
1995
Language:
english
DOI:
10.1109/iedm.1995.499368
File:
PDF, 1.04 MB
english, 1995