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A MEMS Bistable Device With Push-On–Push-Off Capability
Huang, Hen-Wei, Yang, Yao-JoeVolume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2228165
Date:
February, 2013
File:
PDF, 577 KB
english, 2013