[IEEE 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010) - Xiamen (2010.01.20-2010.01.23)] 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems - Application of parallel capacitor for force transferring in resonant micro accelerometer
Wu Zhou,, Wei Su,, Xiao-Ping He,, Bai-Lin Li,, Li-Li Chen,Year:
2010
Language:
english
DOI:
10.1109/nems.2010.5592439
File:
PDF, 288 KB
english, 2010