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Solvent Compatibility of Parylene C Film Layer
Koydemir, Hatice Ceylan, Kulah, Haluk, Ozgen, CananVolume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2273032
Date:
April, 2014
File:
PDF, 1.59 MB
english, 2014