Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load
Zhu, Yinfang, Zhang, Fengxin, Yang, Jinling, Zheng, Haiyang, Yang, FuhuaVolume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2093569
Date:
February, 2011
File:
PDF, 356 KB
english, 2011