A Novel Method for Measuring the Strength of Microbeams

A Novel Method for Measuring the Strength of Microbeams

Elata, D., Hirshberg, A.
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.872237
Date:
April, 2006
File:
PDF, 947 KB
english, 2006
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