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[IEEE 2011 International Meeting for Future of Electron Devices, Kansai (IMFEDK) - Suita, Osaka, Japan (2011.05.19-2011.05.20)] 2011 International Meeting for Future of Electron Devices - Fabrication and axial sensitivity analysis of vibratory piezoelectric cantilever sensors for three-axis tactile sensing
Yang, Yi, Yamashita, Kaoru, Nishimoto, Takanori, Furukawa, Kazuya, Noda, MinoruYear:
2011
Language:
english
DOI:
10.1109/imfedk.2011.5944879
File:
PDF, 1.87 MB
english, 2011