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[IEEE 2012 13th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Cascais, Portugal (2012.04.16-2012.04.18)] 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Mechanical and tribological characterizations for reliability design of micromembranes
Pustan, Marius, Birleanu, Corina, Dudescu, Cristian, Belcin, OvidiuYear:
2012
Language:
english
DOI:
10.1109/esime.2012.6191802
File:
PDF, 1.42 MB
english, 2012