[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Improved scatterometry time to solution for leading-edge logic applications
Vaid, Alok, Sendelbach, Matthew, Komarov, Serguei, Dziura, Ted, Ferns, Jason, Madsen, JonYear:
2010
Language:
english
DOI:
10.1109/asmc.2010.5551476
File:
PDF, 317 KB
english, 2010