[IEEE IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings - Cambridge, MA, USA (12-14 Nov. 1996)] IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings - Partnership for a rapid yield enhancement solution in a manufacturing environment on a 0.65 μm triple level metal device