![](/img/cover-not-exists.png)
[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - CMOS MEMS Lorentz Force Dual-axis Scanning-Stage
Sun, Chih-Ming, Wang, Chuan-Wei, Fang, WeileunYear:
2007
Language:
english
DOI:
10.1109/nems.2007.352086
File:
PDF, 3.81 MB
english, 2007