[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Measures of quality-factor in gap-closing electrostatic resonators
Shmulevich, S., Lerman, M., Elata, D.Year:
2013
Language:
english
DOI:
10.1109/memsys.2013.6474267
File:
PDF, 312 KB
english, 2013