[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - High-density silicon microprobe arrays for LCD pixel inspection
Changyeol Lee,, Yoonhyuk Kim,, Yong-Gie Choi,, Young-Ho Cho,, Kwyro Lee,, Byung Man Kwak,Year:
1996
Language:
english
DOI:
10.1109/memsys.1996.494020
File:
PDF, 744 KB
english, 1996