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[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Edge erosion effects in double sided silicon micromachining
Zanini, M., Mikkor, M., Elder, R.C., Cathey, L.W., Bomback, J.L., Artz, B.E.Year:
1988
DOI:
10.1109/solsen.1988.26451
File:
PDF, 242 KB
1988