[IEEE 2001 Microelectromechanical Systems Conference - Berkeley, CA, USA (24-26 Aug. 2001)] 2001 Microelectromechanical Systems Conference (Cat. No. 01EX521) - Electroacoustic interaction between SAW and vibration modes of high-aspect-ratio electrodes built using LIGA-UV techniques on singly rotated lithium niobate wafers

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