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High-Efficiency PFC Abatement System Utilizing Plasma Decomposition and Ca(OH)$_{2}$/CaO Immobilization
Suzuki, Katsumasa, Ishihara, Yoshio, Sakoda, Kaoru, Shirai, Yasuyuki, Teramoto, Akinobu, Hirayama, Masaki, Ohmi, Tadahiro, Watanabe, Takayuki, Ito, TakashiVolume:
21
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2005400
Date:
November, 2008
File:
PDF, 998 KB
english, 2008