Novel method for fabricating deep submicron Nb/AlO/sub...

IEEE Transactions on Appiled Superconductivity 1999 / 6 Vol. 9; Iss. 2

Novel method for fabricating deep submicron Nb/AlO/sub x//Nb tunnel junctions based on spin-on glass planarization

Pavolotsky, A.B., Weimann, T., Scherer, H., Niemeyer, J., Zorin, A.B., Krupenin, V.A.
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Volume:
9
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/77.783722
Date:
June, 1999
File:
PDF, 497 KB
english, 1999
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