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[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS
Scheurle, A., Fuchs, T., Kehr, K., Leinenbach, C., Kronmuller, S., Arias, A., Ceballos, J., Lagos, M. A., Mora, J. M., Munoz, J. M., Ragel, A., Ramos, J., Van Aerde, S., Spengler, J., Mehta, A., VerbiYear:
2007
Language:
english
DOI:
10.1109/memsys.2007.4433007
File:
PDF, 1.36 MB
english, 2007